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Graduate School of the KIT
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Dr. Frieder Koch

X-ray optics made by X-ray lithography: Process optimization and quality control


Ph.D. Project

Ph.D. Project
Subject:X-ray optics made by X-ray lithography: Process optimization and quality control
Supervisor:

Institute for Microstructure Technology, KIT
Group: Dr. Jürgen Mohr

Research Area:

Optical Systems