Beam shaping in 3D-Litography Systems

  • Job:

    Beam shaping in 3D-Litography Systems

  • Faculty / Division:

    Institute of Photonics and Quantum Electronics (IPQ)

  • Institute:

    KIT

  • Publication Date:

    21.06.2018

  • Contact Person:

    M. Sc. Yilin Xu
    Yilin.Xu@kit.edu
    Tel. 0721-608-41935

    Prof. Christian Koos
    Christian.koos@kit.edu
    Tel. 0721-608-42481